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PDUV-193
Through special laser technology, a high-energy pulse laser with a wavelength of 193nm is generated. The principle is to use technologies such as Q switching to compress laser energy and release it in a very short pulse time to meet application scenarios that require high-energy density pulses.
Parameter
| Wavelength | 193nm |
| Power | 10 mW |
| Operational mode | Pulse |
| Repetition rate | 5 kHz |
| Pulse duration | 10 ns |
| Energy per pulse | 2 μJ |
| M2 | TEM00，<1.6 |
| Beam waist diameter | ~1.5 mm |
| Cooling | Water-cooled |
Applications
| Mask inspection |
| Wafer Inspection |
| Micromachining |
| Spectral calibration |
Downloads
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Contact Information
Email
info@kpglaser.com
Address
24 Sin Ming Lane, Midview City, #06-97, Singapore 573970
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