Based on semiconductor-pumped microchip laser technology, by pumping excitation of a specific laser medium and undergoing a nonlinear frequency conversion process, a stable 266nm continuous laser beam is output.
Wavelength | 266 nm |
Operational mode | CW |
Power | 10 mW 500 mW 1 W |
M2 | TEM00 , <1.3 |
Cooling | Water-cooled |
Wafer surface inspection |
Spectrometer calibration |
Interferometry |
Lithography |