Using high-quality optical crystals and multi-stage nonlinear optical frequency conversion, a stable 193nm continuous laser output is finally obtained.
Wavelength | 193 nm |
Operational mode | CW |
Power | 1 mW 10 mW |
Linewidth | <5 kHz |
M2 | TEM00,<1.6 |
Beam waist diameter | ~2 mm |
Cooling | Water-cooled |
Wafer inspection |
Semiconductor measurement |
Mask inspection |
Lithography |