CDUV-193

Using high-quality optical crystals and multi-stage nonlinear optical frequency conversion, a stable 193nm continuous laser output is finally obtained.

Parameter
Wavelength

193 nm

Operational mode

CW

Power 

1 mW

10 mW

Linewidth

<5 kHz

M2

TEM00,<1.6

Beam waist diameter

~2 mm

Cooling

Water-cooled

Applications
Wafer inspection
Semiconductor measurement
Mask inspection
Lithography
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